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Volumn 66, Issue 7, 2002, Pages 752111-7521113
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Hydrogen migration in doped and undoped polycrystalline and microcrystalline silicon
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BORON;
DEUTERIUM;
HYDROGEN;
PHOSPHORUS;
SILICON;
ARTICLE;
CHEMICAL ANALYSIS;
CONCENTRATION (PARAMETERS);
CRYSTAL;
DIFFUSION;
DIFFUSION COEFFICIENT;
HYDROGENATION;
MICROSCOPY;
MODEL;
TEMPERATURE DEPENDENCE;
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EID: 0037104308
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (17)
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References (36)
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