Enhanced hydrogenation in polycrystalline silicon thin films using low-temperature ultrasound treatment

Applied Physics Letters

Volumn 68, Issue 20, 1996, Pages 2873-2875

  Ostapenko, S ^a   Jastrzebski, L ^a   Lagowski, J ^a   Smeltzer, R K ^b  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b SARNOFF CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010630816     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116353     Document Type: Article

References (13)

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