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Volumn 195, Issue 1-4, 2002, Pages 202-213
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The surface modification of Dow Cyclotene by low energy N 2 + beams and its effect on the adhesion of evaporated Cu films
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Author keywords
Adhesion; Copper; Coulomb explosion; Cyclotene; Nitrogen implantations; XPS
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Indexed keywords
ADHESION;
COALESCENCE;
GRAFTING (CHEMICAL);
ION IMPLANTATION;
METALLIC FILMS;
NITROGEN;
X RAY PHOTOELECTRON SPECTROSCOPY;
NITROGEN IMPLANTATION;
SURFACE TREATMENT;
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EID: 0037099273
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)00540-8 Document Type: Article |
Times cited : (4)
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References (32)
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