Advantages of the "optical cavity substrate" for real time infrared spectroscopy of plasma-surface interactions

Journal of Applied Physics

Volumn 91, Issue 8, 2002, Pages 4840-4845

  Von Keudell, A ^a   Abelson, J R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERISTIC ABSORPTION; DIELECTRIC STACK; INFRARED REFLECTANCE SPECTROSCOPY; LARGE-SIGNALS; NEAR-SURFACE; OPTICAL CAVITIES; OPTICAL SENSITIVITY; PLASMA-SURFACE INTERACTIONS; PROCESSING OF THIN FILMS; REAL TIME; REAL-TIME INFRARED SPECTROSCOPY; REFLECTANCE CHANGES; SENSITIVITY ENHANCEMENTS; SUBMONOLAYER; SURFACE VIBRATIONAL MODES;

CHEMICAL BONDS; INFRARED SPECTROSCOPY; PLASMA INTERACTIONS; REFRACTIVE INDEX; SUBSTRATES; SURFACE REACTIONS; THICK FILMS;

INTERFACES (MATERIALS);

EID: 0037091840     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1456963     Document Type: Article

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