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Surface and Coatings Technology

Volumn 150, Issue 2-3, 2002, Pages 257-262

Study of the initial stages of TiO2 growth on Si wafers by XPS

(1) Leprince Wang, Y a

a National Centre of Scientific Research (France)

Author keywords

Thin films; Titanium oxide; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL ANALYSIS; COMPOSITION; GROWTH (MATERIALS); SILICON; STOICHIOMETRY; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

ENERGY RESOLUTION;

COATINGS;

INORGANIC COATING; SILICON; TITANIUM DIOXIDE;

EID: 0037084534 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01541-9 Document Type: Article

Times cited : (42)

References (21)

1
- 0004177869
- (Ed.), IFI/Plenum, New York
- (1973) The Oxide Handbook , pp. 316
- Samaonov, G.V.¹

2
- 50749135814
- (1993) Thin Solid Films , vol.234 , pp. 458
- Parjadis de Larivière, G.¹ Frigério, J.M.² Bridou, F.³ Rivory, J.⁴

3
- 0000857569
- (1989) J. Appl. Phys , vol.66 , pp. 4747
- Sankur, H.¹ Gunning, W.²

4
- 0017982227
- (1978) Solid State Electron , vol.21 , pp. 837
- Brown, W.D.¹ Granneman, W.W.²

5
- 0027682032
- (1993) Appl. Opt , vol.32 , pp. 5594
- Balasubramanian, K.¹ Han, X.F.² Guenther, K.H.³

6
- 0032715784
- (1999) Thin Solid Films , vol.338 , pp. 105
- Wang, X.¹ Masumoto, H.² Someno, Y.³ Hirai, T.⁴

7
- 0000218543
- (1993) J. Mater. Chem , vol.3 , pp. 1137
- Chen, Z.X.¹ Derking, A.²

8
- 0029519022
- (1995) J. Mater. Res , vol.10 , pp. 3068
- Nagpal, V.J.¹ Davis, R.M.² Desu, S.B.³

9
- 0033877072
- (2000) Thin Solid Films , vol.359 , pp. 171
- Leprince-Wang, Y.¹ Souche, D.² Yu-Zhang, K.³ Fisson, S.⁴ Vuye, G.⁵ Rivory, J.⁶

10
- 0030234849
- (1996) Thin Solid Films , vol.283 , pp. 84
- Gilo, M.¹ Croitoru, N.²

11
- 0034604112
- (2000) J. Phys. Chem. B , vol.104 , pp. 4024
- Matsumoto, Y.¹ Ishikawa, Y.² Nishida, M.³ Ii, S.⁴

12
- 0033691687
- (2000) Nucl. Instrum. Methods Phys. Res. (NIM) B , vol.169 , pp. 21
- Li, C.¹ Zheng, Z.² Zhang, F.³ Yang, S.⁴ Wang, H.⁵ Chen, L.⁶ Zhang, F.⁷ Wang, X.⁸ Liu, X.⁹

13
- 0033154323
- (1999) Vacuum , vol.54 , pp. 221
- Wicikowski, L.¹ Kusz, B.² Murawski, L.³ Szaniawska, K.⁴ Susla, B.⁵

14
- 0032472132
- (1998) Appl. Surf. Sci , vol.125 , pp. 85
- Xiao, Z.¹ Gu, J.² Huang, D.³ Lu, Z.⁴ Wei, Y.⁵

15
- 0031251532
- (1997) Thin Solid Films , vol.307 , pp. 38
- Leprince-Wang, Y.¹ Yu-Zhang, K.² Van Nguyen, V.³ Souche, D.⁴ Rivory, J.⁵

16
- 0035972845
- (2001) Surf. Coatings Technol , vol.140 , pp. 155
- Leprince-Wang, Y.¹ Yu-Zhang, K.²

17
- 0028744703
- (1994) Thin Solid Films , vol.253 , pp. 299
- Yu-Zhang, K.¹ Biosjolly, G.² Rivory, J.³ Kilian, L.⁴ Colliex, C.⁵

18
- 0027641917
- (1993) Appl. Surf , vol.68 , pp. 477
- Turkovic, A.¹ Sockcevic, D.²

19
- 84956249328
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 983
- Liehr, M.¹ Legoue, F.K.² Rubloff, G.W.³ Ho, P.S.⁴

20
- 0002488965
- (1974) Surf. Sci , vol.44 , pp. 29
- Powell, C.J.¹

21
- 33751154507
- (1995) J. Phys. Chem , vol.99 , pp. 1484
- Lassaletta, G.¹ Fernandez, A.² Espinos, J.P.³ Gonzalez-Elipe, A.R.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.