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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 169, Issue 1-4, 2000, Pages 21-25

TiO2-x films prepared by ion beam assisted deposition

(9) Li, Changrong a Zheng, Zhihong a Zhang, Fuming a Yang, Shiqi a Wang, Huiming a Chen, Lizhi a Zhang, Feng a Wang, Xianghui a Liu, Xianghuai a

a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY (China)

Author keywords

Annealing; IBAD; Raman; RBS; Titanium dioxide; XPS; XRD

Indexed keywords

EID: 0033691687 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(00)00010-0 Document Type: Article

Times cited : (30)

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