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Volumn 149, Issue 2-3, 2002, Pages 129-134

Atmospheric pressure chemical vapour deposition of polycarbosilane films via UV laser-induced polymerization of ethynyltrimethylsilane

Author keywords

Chemical vapour deposition; Ethynyltrimethylsilane; Laser; Polycarbosilane films

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; FABRICATION; GLASS; POLYCARBONATES; POLYMERIZATION;

EID: 0037080597     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01495-5     Document Type: Article
Times cited : (5)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.