Nano-crystalline diamond films prepared by microwave argon plasma vapor deposition on optical glass

Vacuum

Volumn 68, Issue 1, 2002, Pages 49-55

  Wubao, Yang ^a,b   Xiang, Kong ^b   Size, Yang ^b   Xiaofeng, Duan ^b   Fanxiu, Lü ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b INSTITUTE OF PHYSICS   (China)

Author keywords

Argon ambient; Chemical vapor deposition; Nano crystalline diamond films

Indexed keywords

ARGON; DIAMOND FILMS; GRAIN SIZE AND SHAPE; GRINDING (COMMINUTION); MICROWAVES; NANOSTRUCTURED MATERIALS; OPTICAL GLASS; SUBSTRATES;

NANOCRYSTALLINE DIAMOND FILMS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0037078238     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00284-1     Document Type: Article

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