Electrical and optical properties of SnO 2 :Sb films prepared on polyimide substrate by r.f. bias sputtering

Applied Surface Science

Volumn 189, Issue 1-2, 2002, Pages 157-161

  Hao, Xiaotao ^a   Ma, Jin ^a   Zhang, Deheng ^a   Yang, Yingge ^a   Xu, Xiangang ^a   Chen, Feng ^a   Ma, Honglei ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Antimony doped tin oxide; Organic substrate; r.f. bias sputtering; Thin films

Indexed keywords

ANTIMONY; DOPING (ADDITIVES); ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; OPTICAL PROPERTIES; POLYAMIDES; SPUTTERING; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TIN COMPOUNDS;

BIAS SPUTTERING;

SURFACE PROPERTIES;

EID: 0037076199     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00014-4     Document Type: Article

References (13)