Diffractive optical elements based on fourier optical techniques: A new class of optics for extreme ultraviolet and soft x-ray wavelengths

Applied Optics

Volumn 41, Issue 35, 2002, Pages 7384-7389

  Chang, Chang ^a,b   Naulleau, Patrick ^a   Anderson, Erik ^a   Rosfjord, Kristine ^a,b   Attwood, David ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FOURIER OPTICS; INTERFEROMETRY; ULTRAVIOLET RADIATION; X RAYS;

DIFFRACTIVE OPTICAL ELEMENTS;

DIFFRACTIVE OPTICS;

EID: 0037059116     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.007384     Document Type: Article

References (5)

1. D. T. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University, Cambridge, U.K., 1999).
2. C. Chang, P. Naulleau, E. H. Anderson, E. M. Gullikson, K. A. Goldberg, and D. Attwood, “Direct index of refraction measurement at extreme ultraviolet wavelength region with a novel interferometer,” Opt. Lett. 27, 1028-1030 (2002).
3. J. W. Goodman, Introduction to Fourier Optics, 2nd ed., (McGraw-Hill, New York, 1996), Chap. 5, Problem 14.
4. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution X-ray applications,” J. Vac. Sci. Technol. B 18, 2970-2985 (2000).
5. D. T. Attwood, P. Naulleau, K. A. Goldberg, E. Tejnil, C. Chang, R. Beguiristain, P. Batson, J. Bokor, E. M. Gullikson, M. Koike, H. Medecki, and J. H. Underwood, “Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions,” IEEE J. Quantum Electron. 35, 709-720 (1999).