Chemical treatment effect of Si(111) surfaces in F-based aqueous solutions

Journal of Applied Physics

Volumn 80, Issue 9, 1996, Pages 5422-5426

  Adachi, Sadao ^a   Arai, Takehiko ^a   Kobayashi, Kazuyuki ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001202763     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362729     Document Type: Article

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