Molybdenum-containing carbon films deposited using the screen grid technique in an electron cyclotron resonance chemical vapor deposition system

Diamond and Related Materials

Volumn 9, Issue 3-6, 2000, Pages 534-538

  Huang, Q F ^a   Yoon, S F ^a   Rusli, ^a   Yang, H ^a   Ahn, J ^a   Zhang, Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Carbon; Chemical vapor deposition; Molybdenum

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; HARDNESS; LIGHT ABSORPTION; MOLYBDENUM; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

SCREEN GRID TECHNIQUE;

CARBON;

CARBON; MOLYBDENUM; VAPOR DEPOSITION;

EID: 0034047637     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00221-6     Document Type: Conference Paper

References (12)

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