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Volumn 106, Issue 17, 2002, Pages 4429-4434

Theoretical investigation of the structure and vibrational spectrum of the electronic ground state X̃(1A′) of HSiCl

Author keywords

[No Author keywords available]

Indexed keywords

ANHARMONICITY; ELECTRONIC GROUND STATE; MONOCHLOROSILYLENE; ROTATIONAL CONSTANTS;

EID: 0037007780     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp013761c     Document Type: Article
Times cited : (18)

References (76)
  • 5
    • 10244251428 scopus 로고    scopus 로고
    • Gupta, D. C., Brown, G. A., Eds.; ASTM Special Technical Publication 1382; ASTM: WestConshochen, PA
    • (a) Gupta, D. C., Brown, G. A., Eds. Gate Dielectric Integrity: Material, Process and Tool Qualification. ASTM Special Technical Publication 1382; ASTM: WestConshochen, PA, 2000.
    • (2000) Gate Dielectric Integrity: Material, Process and Tool Qualification
  • 8
    • 0011250669 scopus 로고    scopus 로고
    • Powell, C. F., Oxley, J. H., Blocher, J. M., Jr., Eds.; John Wiley & Sons: New York
    • (b) Powell, C. F., Oxley, J. H., Blocher, J. M., Jr., Eds. Vapor Deposition; John Wiley & Sons: New York, 1966.
    • (1996) Vapor Deposition
  • 35
    • 0011228125 scopus 로고    scopus 로고
    • note
    • HSiCl has only been detected in CVD using laser-induced fluorescence spectroscopy (LIF). It is known that LIF is one of the most sensitive techniques available for the detection of atoms and molecules and it has proved its ability to provide unambiguous species identification (ref 5).
  • 36
    • 0011174659 scopus 로고    scopus 로고
    • note
    • 2 was added to the reaction endothermicity to obtain the activation energy
  • 39
    • 0011251032 scopus 로고    scopus 로고
    • note
    • g are obtained from vibrational spectroscopy or by ab initio computation.
  • 46
    • 0001039562 scopus 로고
    • Yarkony, D. R., Ed.; World Scientific: Singapore
    • (a) Bartlett, R. J. In Modern Electronic Structure Theory; Yarkony, D. R., Ed.; World Scientific: Singapore, 1995; p 1047.
    • (1995) Modern Electronic Structure Theory , pp. 1047
    • Bartlett, R.J.1
  • 61
    • 0011214768 scopus 로고    scopus 로고
    • Basis set obtained from Prof. K. A. Peterson (Washington State University, Richland Campus)
    • Basis set obtained from Prof. K. A. Peterson (Washington State University, Richland Campus).
  • 63
    • 0002199283 scopus 로고
    • Durig, J. R., Ed.; Elsevier: Amsterdam; Chapter, 1
    • Watson, J. K. G. In Vibrational Spectra and Structure; Durig, J. R., Ed.; Elsevier: Amsterdam, 1977; Vol. 6, Chapter, 1.
    • (1977) Vibrational Spectra and Structure , vol.6
    • Watson, J.K.G.1
  • 65
    • 0001136801 scopus 로고
    • Rao, N. K., Matthews, C. W., Eds.; Academic Press: New York
    • Mills, I. M. In Modern Spectroscopy: Modern Research; Rao, N. K., Matthews, C. W., Eds.; Academic Press: New York, 1972; p 115.
    • (1972) Modern Spectroscopy: Modern Research , pp. 115
    • Mills, I.M.1
  • 71
    • 0011228126 scopus 로고    scopus 로고
    • note
    • 13 = -1.93.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.