Preview-based optimal inversion for output tracking: Application to scanning tunneling microscopy

Proceedings of the IEEE Conference on Decision and Control

Volumn 1, Issue , 2002, Pages 79-85

  Zou, Qingze ^a   Devasia, Santosh ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CONSTRAINT THEORY; CONTROL SYSTEM SYNTHESIS; ELECTRON BEAM LITHOGRAPHY; MATHEMATICAL MODELS; NANOTECHNOLOGY; PARAMETER ESTIMATION; POLES AND ZEROS; SCANNING TUNNELING MICROSCOPY; STATE SPACE METHODS; TRACKING (POSITION); TRAJECTORIES;

OPTIMAL INVERSION; OUTPUT TRACKING; TRAJECTORY PLANNING;

OPTIMAL CONTROL SYSTEMS;

EID: 0036990727     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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