Electrically induced junction MOSFET for high performance sub-50nm CMOS technology

Materials Research Society Symposium - Proceedings

Volumn 716, Issue , 2002, Pages 305-310

  Dixit, Abhisek ^a   Dusane, Rajiv O ^a   Ramgopal Rao, V ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEGRADATION; ELECTRIC CONDUCTIVITY; OXIDES; POLYSILICON; THICKNESS MEASUREMENT;

DRAIN INDUCED BARRIER LOWERING; ELECTRICALLY INDUCED JUNCTION; SHORT CHANNEL EFFECTS; SOURCE DRAIN EXTENSIONS;

MOSFET DEVICES;

EID: 0036955670     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-716-b7.6     Document Type: Conference Paper

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