Instrumentation for plasma immersion ion implantation

Review of Scientific Instruments

Volumn 73, Issue 12, 2002, Pages 4277-4282

  Lopez Callejas, R ^a,b   Valencia Alvarado, R ^a   Munoz Castro A E ^a   Godoy Cabrera, O G ^a,b   Tapia Fabela, J L ^a,c  

^a INSTITUTO NACIONAL DE INVESTIGACIONES NUCLEARES   (Mexico)

^b INSTITUTO TECNOLÓGICO DE TOLUCA   (Mexico)

^c SCHOOL OF ENGINEERING AND SCIENCES   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

GLOW DISCHARGES; NUCLEAR INSTRUMENTATION; PLASMA DENSITY; PLASMA DIAGNOSTICS; SPECTROSCOPIC ANALYSIS; VACUUM TECHNOLOGY;

PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0036933149     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1517144     Document Type: Article

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