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Volumn , Issue , 2002, Pages 869-872
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Nitride-sandwiched-oxide gate insulator for low power CMOS
a
HITACHI LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC MATERIALS;
ELECTRIC INSULATORS;
ELECTRON MOBILITY;
LEAKAGE CURRENTS;
NITRIDES;
GATE INSULATORS;
CMOS INTEGRATED CIRCUITS;
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EID: 0036923769
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (12)
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References (5)
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