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Volumn , Issue , 2002, Pages 424-431

CAD computation for manufacturability: Can we save VLSI technology from itself?

Author keywords

[No Author keywords available]

Indexed keywords

CELL DESIGN; PHOTOMASKS;

EID: 0036916525     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/774572.774635     Document Type: Conference Paper
Times cited : (5)

References (9)
  • 1
    • 4243731810 scopus 로고    scopus 로고
    • Efficient generation of fill shapes for chips and packages
    • U. S. Patent 5,636,133, June
    • D. Chesebro, Y. Kim, M. Lavin, D. Maynard, "Efficient Generation of Fill Shapes for Chips and Packages", U. S. Patent 5,636,133, June, 1997.
    • (1997)
    • Chesebro, D.1    Kim, Y.2    Lavin, M.3    Maynard, D.4
  • 2
    • 0031075964 scopus 로고    scopus 로고
    • Exploiting structure in fast aerial image computation for IC patterns
    • Feb
    • Y. C. Pati, A. A. Ghazanfarian, R. F. Pease, "Exploiting Structure in Fast Aerial Image Computation for IC Patterns", IEEE Trans. Semi. Mfg., Vol. 10, No. 1, pp. 62-74, Feb, 1997.
    • (1997) IEEE Trans. Semi. Mfg. , vol.10 , Issue.1 , pp. 62-74
    • Pati, Y.C.1    Ghazanfarian, A.A.2    Pease, R.F.3
  • 3
    • 0030314809 scopus 로고    scopus 로고
    • Approximate models for resist process effects
    • T. Brunner and R. Ferguson, "Approximate Models for Resist Process Effects", Proc. SPIE Vol 2726, 1996.
    • (1996) Proc. SPIE , vol.2726
    • Brunner, T.1    Ferguson, R.2
  • 4
    • 0020249292 scopus 로고
    • Improving resolution in photolithography with a phase-shifting mask
    • Dec.
    • M. Levenson, N. Viswanathan and R. Simpson, "Improving resolution in photolithography with a phase-shifting mask", IEEE Trans. Electr. Devices, Vol. 29, pp1828-1836, Dec. 1982.
    • (1982) IEEE Trans. Electr. Devices , vol.29 , pp. 1828-1836
    • Levenson, M.1    Viswanathan, N.2    Simpson, R.3
  • 5
    • 4244091469 scopus 로고    scopus 로고
    • Use of net coloring for automatic generation of phase shift masks
    • U. S. Patent 5,883,813, Mar.
    • Y. Kim, M. Lavin, L. Liebmann, G. Weinert, "Use of Net Coloring for Automatic Generation of Phase Shift Masks", U. S. Patent 5,883,813, Mar. 1999.
    • (1999)
    • Kim, Y.1    Lavin, M.2    Liebmann, L.3    Weinert, G.4
  • 6
    • 0028261336 scopus 로고
    • Automatic generation of phase shift mask layouts
    • T. Wass, et al., "Automatic Generation of Phase Shift Mask Layouts," Microelectronic Engineering, Vol. 23, pp. 139-142, 1994.
    • (1994) Microelectronic Engineering , vol.23 , pp. 139-142
    • Wass, T.1
  • 7
    • 0034848378 scopus 로고    scopus 로고
    • Enabling alternating phase shifted mask designs for a full logic gate level: Design rules and design rule checking
    • L. Liebmann, J. Lund, F.-L. Heng, I. Graur, "Enabling Alternating Phase Shifted Mask Designs for a Full Logic Gate Level: Design Rules and Design Rule Checking", Proc. DAC, 2001.
    • Proc. DAC, 2001
    • Liebmann, L.1    Lund, J.2    Heng, F.-L.3    Graur, I.4
  • 8
    • 0012191175 scopus 로고    scopus 로고
    • Aplication of automated design migration to altarnating PSM design
    • F.-L. Heng, J. Lund, L. Liebmann, "Aplication of Automated Design Migration to Altarnating PSM Design", ISPD, 2001.
    • (2001) ISPD
    • Heng, F.-L.1    Lund, J.2    Liebmann, L.3
  • 9
    • 0022719974 scopus 로고
    • On yield, fault distributions and clustering of particles
    • C. H. Stapper, On yield, fault distributions and clustering of particles, IBM J. Res. Devel., 30: 326-338, 1986.
    • (1986) IBM J. Res. Devel. , vol.30 , pp. 326-338
    • Stapper, C.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.