Exploiting structure in fast aerial image computation for integrated circuit patterns

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 1, 1997, Pages 62-74

  Pati, Y C ^a   Ghazanfarian, Amir Aalam ^b   Pease, R Fabian ^b  

^a HARVARD UNIVERSITY   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; IMAGE ANALYSIS; IMAGING SYSTEMS; INTEGRATED CIRCUIT MANUFACTURE; MASKS; NONLINEAR EQUATIONS; PHOTOLITHOGRAPHY;

FAST AERIAL IMAGE COMPUTATION; INTEGRATED CIRCUIT PATTERNS;

COMPUTER SIMULATION;

EID: 0031075964     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.554485     Document Type: Article

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