Modeling of argon discharge characteristics of planar-type surface wave plasmas in an electron fluid model

IEEE Transactions on Plasma Science

Volumn 30, Issue 6, 2002, Pages 2095-2101

  Toba, Takayuki ^a   Katsurai, Makoto ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

FDTD method; Fluid model; Surface wave plasma

Indexed keywords

ALUMINA; ARGON; CARRIER CONCENTRATION; COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; HEAT CONDUCTION; MICROWAVES; PLASMA DENSITY; SURFACE WAVES; THICKNESS MEASUREMENT; TIME DOMAIN ANALYSIS;

ARGON DISCHARGE CHARACTERISTICS; ELECTRON FLUID MODEL; ELECTRON TEMPERATURE; PLANAR TYPE SURFACE WAVES PLASMAS;

PLASMAS;

EID: 0036914461     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.807624     Document Type: Article

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