Consequences of mode structure on plasma properties in electron cyclotron resonance sources

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2421-2430

  Kinder, Ronald L ^a   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033414538     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581978     Document Type: Article

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