Extraction and LVS for mixed-domain integrated MEMS layouts

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers

Volumn , Issue , 2002, Pages 361-366

  Baidya, Bikram ^a   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Integrated MEMS; MEMS extraction; MEMS LVS; Parasitics; Verification

Indexed keywords

ATOMIC ELEMENTS; DESIGN FLOW; INTEGRATED EXTRACTOR;

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; COMPARATOR CIRCUITS; COMPUTER SIMULATION; DRY ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; POLYSILICON; RESONATORS; SCANNING ELECTRON MICROSCOPY; SCHEMATIC DIAGRAMS;

INTEGRATED CIRCUIT LAYOUT;

EID: 0036911925     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/774572.774626     Document Type: Conference Paper

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