High performance accelerometer based on CMOS technologies with low cost add-ons

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 6-9

  Brandl, M ^a   Kempe, V ^a  

^a AMS AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE PARTS AND EQUIPMENT; CMOS INTEGRATED CIRCUITS; READOUT SYSTEMS; ROBUSTNESS (CONTROL SYSTEMS); SENSORS;

BATCH FABRICATION;

ACCELEROMETERS;

EID: 0034998405     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)