Electron-beam dissociation of the MgH complex in p-type GaN

Journal of Applied Physics

Volumn 92, Issue 11, 2002, Pages 6630-6635

  Myers, S M ^a   Seager, C H ^a   Wright, A F ^a   Vaandrager, B L ^a   Nelson, J S ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Uniroyal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPLEXATION; DISSOCIATION; ELECTRON BEAMS; ELECTRON IRRADIATION; INFRARED SPECTROSCOPY; MAGNESIUM COMPOUNDS;

LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI);

GALLIUM COMPOUNDS;

EID: 0036905863     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1515128     Document Type: Article

References (32)

1. H. Amano, M. Kito, K. Hiramatsu, and I. Akasaki, Jpn. J. Appl. Phys., Part 2 28, L2112 (1989).
2. M. Inamori, H. Sakai, T. Tanaka, H. Amano, and I. Akasaki, Jpn. J. Appl. Phys., Part 1 34, 1190 (1995).
3. X. Li and J.J. Coleman, Appl. Phys. Lett. 69, 1605 (1996).
4. X. Li, S.Q. Gu, E.E. Reuter, J.T. Verdeyen, S.G. Bishop, and J.J. Coleman, J. Appl. Phys. 80, 2687 (1996).
5. J. Neugebauer and C.G. Van de Walle, Phys. Rev. Lett. 75, 4452 (1995).
6. A. Bosin, V. Fiorentini, and D. Vanderbilt, Mater. Res. Soc. Symp. Proc. 395, 503 (1996).
7. S.M. Myers, A.F. Wright, G.A. Petersen, C.H. Seager, W.R. Wampler, M.H. Crawford, and J. Han, J. Appl. Phys. 88, 4676 (2000).
8. W. Götz, N.M. Johnson, D.P. Bour, M.D. McCluskey, and E.E. Haller, Appl. Phys. Lett. 69, 3725 (1996).
9. B. Clerjaud, D. Côte, A. Lebkiri, C. Naud, J.M. Baranowski, K. Pakula, D. Wasik, and T. Suski, Phys. Rev. B 61, 8238 (2000).
10. S.J. Pearton, J.W. Lee, and C. Yuan, Appl. Phys. Lett. 68, 2690 (1996).
11. M. Miyachi, T. Tanaka, Y. Kimura, and H. Ota, Appl. Phys. Lett. 72, 1101 (1998).
12. M. Miyachi, H. Ota, Y. Kimura, A. Watanabe, T. Tanaka, H. Takahashi, and K. Chikuma, Jpn. J. Appl. Phys., Part 2 38, L1237 (1999).
13. C.H. Seager and R.A. Anderson, Appl. Phys. Lett. 59, 585 (1991).
14. E. Constant, D. Bernard-Loridant, S. Mezière, M. Constant, and J. Chevallier, J. Appl. Phys. 85, 6526 (1999).
15. S. Silvestre, D. Bernard-Loridant, E. Constant, M. Constant, and J. Chevallier, Appl. Phys. Lett. 77, 3206 (2000).
16. V.J. Bellitto, B.D. Thoms, D.D. Koleske, A.E. Wickenden, and R.L. Henry, Phys. Rev. B 60, 4821 (1999).
17. J.W. Lyding, K. Hess, G.C. Abeln, D.S. Thompson, J.S. Moore, M.C. Hersam, E.T. Foley, J. Lee, Z. Chen, S.T. Hwang, H. Choi, Ph. Avouris, and I.C. Kizilyalli, Appl. Surf. Sci. 130-132, 221 (1998).
18. M.M. Albert and N.H. Tolk, Phys. Rev. B 63, 035308 (2000).
19. J.W. Lyding, K. Hess, and I.C. Kizilyalli, Appl. Phys. Lett. 68, 2526 (1996).
20. T.-C. Shen, C. Wang, G.C. Abeln, J.R. Tucker, J.W. Lyding, Ph. Avouris, and R.E. Walkup, Science 268, 1590 (1995).
21. K. Hess, L.F. Register, B. Tuttle, J. Lyding, and I.C. Kizilyalli, Physica E (Amsterdam) 3, 1 (1998).
22. C.H. Seager, S.M. Myers, B. Vaandrager, and J.S. Nelson, Appl. Phys. Lett. 80, 2693 (2002).
23. T.E. Everhart and P.H. Hoff, J. Appl. Phys. 42, 5837 (1971).
24. W.R. Wampler (private communication).
25. 2 in GaN, this property is suggested by the small dipole moment and resultant weak absorption found for the molecule in other semiconductors, see, e.g., R.C. Newman, R.E. Pritchard, J.H. Tucker, and E.C. Lightowlers, Phys. Rev. B 60, 12775 (1999).
26. The theoretical approach has been described by A.F. Wright, Phys. Rev. B 60, R5101 (1999).
27. S.M. Myers and A.F. Wright, J. Appl. Phys. 90, 5612 (2001).
28. This simplified form emerges from the equations of motion of the two particles under the assumption that the deflection of the impinging energetic particle is small and the initially stationary particle moves only slightly during the time interval of the close encounter. A more precise result can be had by angular integration of the differential Rutherford cross section using a minimum scattering angle obtained from general equations for scattering kinematics, see, e.g., J.R. Tesmer and M. Nastasi, Handbook of Modern Ion Beam Materials Analysis (Materials Research Society, Pittsburgh, PA, 1995), pp. 39-40, 412-414.
29. D. Menzel and R. Gomer, J. Chem. Phys. 41, 3311 (1964).
30. F.S. Ham, J. Phys. Chem. Solids 6, 335 (1958).
31. C.H. Seager, S.M. Myers, A.F. Wright, D.D. Koleske, and A.A. Allerman, J. Appl. Phys. (accepted).
32. A.F. Wright (unpublished).