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Volumn 17, Issue 12, 2002, Pages 1261-1266

GaAs metal-semiconductor-metal photodetectors with low dark current and high responsivity at 850 nm

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; FABRICATION; LIGHT ABSORPTION; PHOTODETECTORS; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR DOPING;

EID: 0036903767     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/17/12/309     Document Type: Article
Times cited : (9)

References (22)
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  • 4
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    • Martin E.A., Vaccaro K., Spaziani S.M. and Lorenzo J.P. 1995 Backside illumination processing technology for InGaAs/InAlAs/InP photofets and MSMs Microelectron. J. 26 497-505.
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    • InGaAs metal-semiconductor-metal photodetectors with engineered schottky barrier heights
    • Wohlmuth W.A., Arafa M., Mahajan A., Fay P. and Adesida I. 1996 InGaAs metal-semiconductor-metal photodetectors with engineered Schottky barrier heights Appl. Phys. Lett. 69 3578-80.
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 3578-3580
    • Wohlmuth, W.A.1    Arafa, M.2    Mahajan, A.3    Fay, P.4    Adesida, I.5
  • 10
    • 0030216511 scopus 로고    scopus 로고
    • Dark current suppression in GaAs metal-semiconductor-metal photodetectors
    • Wohlmuth W.A., Fay P. and Adesida I. 1996 Dark current suppression in GaAs metal-semiconductor-metal photodetectors IEEE Photon. Technol. Lett. 8 1061-3.
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    • Application of indium-tin-oxide with improved transmittance at 1.3 μm for MSM photodetectors
    • Seo J.W., Caneau C., Bhat R. and Adesida I. 1993 Application of indium-tin-oxide with improved transmittance at 1.3 μm for MSM photodetectors IEEE Photon. Technol. Lett. 5 1313-5.
    • (1993) IEEE Photon. Technol. Lett. , vol.5 , pp. 1313-1315
    • Seo, J.W.1    Caneau, C.2    Bhat, R.3    Adesida, I.4
  • 14
    • 0026945293 scopus 로고
    • High-performance back-iluminated InGaAs/InAlAs MSM photodetector with a record responsivity of 0.96 A/W
    • Kim J.H., Griem H.T., Friedman R.A., Chan E.Y. and Ray S 1992 High-performance back-iluminated InGaAs/InAlAs MSM photodetector with a record responsivity of 0.96 A/W IEEE Photon. Technol. Lett. 4 1241-4.
    • (1992) IEEE Photon. Technol. Lett. , vol.4 , pp. 1241-1244
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    • Yuang R.H., Chyi J.I., Chan Y.J., Lin W. and Tu K.Y. 1995 High-responsivity InGaAs MSM photodetectors with semi-transparent Schottky contacts IEEE Photon. Technol. Lett. 7 1333-5.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.