Characterization of an ultraviolet and a vacuum-ultraviolet irradiance meter with synchrotron radiation

Applied Optics

Volumn 41, Issue 34, 2002, Pages 7173-7178

  Shaw, Ping Shine ^a   Gupta, Rajeev ^a   Lykke, Keith R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; IRRADIATION; MEASUREMENTS; MICROPROCESSOR CHIPS; RADIATION DETECTORS; SYNCHROTRON RADIATION; ULTRAVIOLET SPECTROSCOPY;

IRRADIANCE METERS;

PHOTOLITHOGRAPHY;

EID: 0036902131     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.007173     Document Type: Article

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