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Volumn 35, Issue 6, 2002, Pages 571-573

Measurement of bulk etch rate of LR115 detector with atomic force microscopy

Author keywords

Atomic force microscopy (AFM); Bulk etch rate; LR115; Solid state nuclear track detector

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; IONS; MATHEMATICAL MODELS;

EID: 0036882611     PISSN: 13504487     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4487(02)00069-0     Document Type: Article
Times cited : (19)

References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.