Economic analysis and optimization of tool portfolio in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 15, Issue 4, 2002, Pages 447-453

  Chou, Yon Chun ^a   Wu, Chuan Shun ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Configuration design; Cycle time reduction; Resource portfolio planning

Indexed keywords

DECISION MAKING; ECONOMIC AND SOCIAL EFFECTS; OPTIMIZATION; QUEUEING THEORY; THROUGHPUT;

CONFIGURATION DESIGN;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036869938     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.804885     Document Type: Conference Paper

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