Tool capacity planning for semiconductor fabrication facilities under demand uncertainty

European Journal of Operational Research

Volumn 120, Issue 3, 2000, Pages 545-558

  Swaminathan, Jayashankar M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; HEURISTIC METHODS; INVENTORY CONTROL; MATHEMATICAL MODELS; OPTIMIZATION; PROCESS ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE; STRATEGIC PLANNING; UNCERTAIN SYSTEMS;

DEMAND SCENARIOS; TOOL CAPACITY PLANNING;

PRODUCTION CONTROL;

EID: 0033889013     PISSN: 03772217     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0377-2217(98)00389-0     Document Type: Article

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