A thermal microactuator made by partial impregnation of polyimide with paraffin

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 849-854

  Klintberg, L ^a   Thornell, G ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; IMPREGNATION; MICROELECTROMECHANICAL DEVICES; PARAFFINS; PHASE TRANSITIONS; POLYIMIDES; POROSITY; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY;

ION TRACK TECHNOLOGY; SOLID-TO-LIQUID PHASE TRANSITION; THERMAL MICROACTUATOR;

MICROACTUATORS;

EID: 0036851654     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/316     Document Type: Article

References (16)

1. Klintberg L, Bexell M and Johansson S 1998 Characterisation of a linear piezoelectric miniature motor Proc. World Ceramic Congress and Forum on New Materials, CIMTEC'98 (14th-19th June 1998, Florence, Italy)
2. Jager E, Smela E and Ingan̈as O 2000 Microfabricating conjugated polymer actuators Science 290 1540-5
3. Smela E, Kallenbach M and Holdenried J 1999 Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates J. Microelectromech. Syst. 8 373-83
4. Jager E, Ingänas O and Lundström I 2000 Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation Science 288 2335-8
5. Watanabe M, Shirai H and Hirai T 2001 Ionic polarization in bending-electrostrictive response of polyurethane films J. Appl. Phys. 90 6316-6320
6. Maluf N 2000 An Introduction to Microelectromechanical Systems Engineering (Boston: Artech House)
7. Ebefors T, Kälvesten E and Stemme G 1998 Dynamic actuation of polyimide V-groove joints by electrical heating Sensors Actuators 67 199-204
8. Freund M, Csikós R, Keszthelyi S and Mózes G Y 1982 Paraffin Products Properties, Technologies, Applications (Amsterdam: Elsevier)
9. Otsuka K and Wayman C M (ed) 1999 Shape Memory Materials (Cambridge: Cambridge University Press)
10. Ghosh M K and Mittal K L (ed) 1996 Polyimides, Fundamentals and Applications (New York: Dekker)
11. Karlsson S and Johansson S 1999 A new flexible building technique for microsystems Proc. SPIE Int. Symp. on Microelectronics and Microelectromechanical Systems (Surfers Paradise, Australia)
12. Spohr R 1990 Ion Tracks and Microtechnology (Braunschweig: Friedr, Vieweg & Sohn Verlagsgesellschaft mbH)
13. Klintberg L, Lindeberg M and Thornell G 2001 Sodium hypochlorite as a developer for heavy ion tracks in polyimide Nucl. Instrum. Methods B 184 536-43
14. Zolle P 1995 Standard Pressure-Volume-Temperature Data for Polymers (Lancaster: Technomic)
15. Klintberg L, Karlsson M, Stenmark L, Schweitz J-Å and Thornell G 2002 A large stroke, high force paraffin phase transition actuator Sensors Actuators A 96 189-95
16. Thornell G, Spohr R, van Velduizen E J and Hjort K. 1999 Micromachining by ion track lithography Sensors Actuators 73 176-83