Phenomenological model for gas-damping of micromechanical structures

Sensors and Actuators, A: Physical

Volumn 72, Issue 1, 1999, Pages 49-70

  Greywall, Dennis S ^a,b,c   Busch, Paul A ^a,d   Walker, James A ^a,e  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF DETROIT MERCY   (United States)

^c INDIANA UNIVERSITY   (United States)

^d Upsala College   (United States)

^e RUTGERS UNIVERSITY   (United States)

Author keywords

Frequency response; Gas damping; Square wave response

Indexed keywords

EQUATIONS OF MOTION; FREQUENCY RESPONSE; LINEARIZATION; MATHEMATICAL MODELS;

GAS-DAMPING; MICROMECHANICAL STRUCTURES;

DAMPING;

EID: 0033534282     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00203-9     Document Type: Article

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