Impedance matching for one atmosphere uniform glow discharge plasma (OAUGDP) reactors

IEEE Transactions on Plasma Science

Volumn 30, Issue 5 I, 2002, Pages 1922-1930

  Chen, Zhiyu ^a  

^a University of Tennessee   (United States)

Author keywords

Impedance matching; OAUGDP; One atmosphere uniform glow discharge plasma; RF power supplies

Indexed keywords

ELECTRIC IMPEDANCE; GLOW DISCHARGES; IMPEDANCE MATCHING (ELECTRIC); MATHEMATICAL MODELS; POWER SUPPLY CIRCUITS;

ONE ATMOSPHERE UNIFORM GLOW DISCHARGE PLASMA; PLASMA REACTOR; RADIO FREQUENCY POWER SUPPLY;

PLASMA DEVICES;

EID: 0036826750     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.805373     Document Type: Article

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