Pulsed laser ablation of polyimide: Fundamental aspects

Journal of Photochemistry and Photobiology A: Chemistry

Volumn 106, Issue 1-3, 1997, Pages 27-30

  Bauerle D ^a   Himmelbauer, M ^a   Arenholz, E ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Fundamental aspects; Polyimide; Pulsed laser ablation

Indexed keywords

EID: 0037611696     PISSN: 10106030     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1010-6030(97)00034-8     Document Type: Article

References (17)

1. D. Bäuerle, Laser Processing and Chemistry, Springer, Heidelberg, 1996.
2. R. Srinivasan, in: J.C. Miller (Ed.), Laser Ablation: Principles and Applications, Springer, Heidelberg, 1994, p. 107.
3. B. Luk'yanchuk, N. Bityurin, S. Anisimov, D. Bäuerle, Appl. Phys. A 57 (1993) 367.
4. B. Luk'yanchuk, N. Bityurin, S. Anisimov, D. Bäuerle, Appl. Phys. A 57 (1993) 449.
5. B. Luk'yanchuk, N. Bityurin, S. Anisimov, N. Arnold, D. Bäuerle, Appl. Phys. A 62 (1996) 397.
6. R. Sauerbrey, G.H. Pettit, Appl. Phys. Lett. 55 (1989) 421.
7. G.V. Treyz, R. Scarmozzino, R.M. Osgood Jr., Appl. Phys. Lett. 55 (1989) 346.
8. R. Srinivasan, Appl. Phys. Lett. 58 (1991) 2895.
9. R. Srinivasan, J. Appl. Phys. 72 (1992) 1651.
10. M. Himmelbauer, E. Arenholz, D. Bäuerle, Appl. Phys. A 63 (1996) 87.
11. M. Himmelbauer, E. Arenholz, D. Bäuerle, K. Schilcher, Appl. Phys. A 63 (1996) 337.
12. M. Himmelbauer, N. Arnold, N. Bityurin, E. Arenholz, D. Bäuerle, Appl. Phys. A, (1997), in press.
13. C. Feger, M.M. Khojasteh, J.E. McGrath, Polyimides: Materials, Chemistry and Characterization, Elsevier Science, Amsterdam, 1989.
14. M.I. Bessonov, Poliimidy-Klass Termostoykikh Polimerov, Nauka Press, Leningrad, 1983.
15. S. Küper, J. Brannon, K. Brannon, Appl. Phys. A 56 (1993) 43.
16. P.E. Dyer, J. Sidhu, J. Appl. Phys. 57 (1985) 1420.
17. H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo, Z. Bor, Appl. Phys. A 54 (1992) 158.