Ion-beam-induced dual-tone imaging of polyimide via two-step imidization

Chemistry of Materials

Volumn 14, Issue 10, 2002, Pages 4186-4191

  Suzuki, Yasuyuki ^b   Maekawa, Yasunari ^a   Yoshida, Masaru ^a   Maeyama, Katsuya ^b   Yonezawa, Noriyuki ^b  

^a TAKASAKI ADVANCED RADIATION RESEARCH INSTITUTE   (Japan)

^b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

POLYIMIDE; POLYMER; TETRAMETHYLAMMONIUM;

ADSORPTION; ARTICLE; CHEMICAL REACTION; CHEMICAL STRUCTURE; FILM; IMAGING; IRRADIATION; SPECTRUM; SYNTHESIS; THERMOSTABILITY;

EID: 0036800579     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm020223j     Document Type: Article

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