Development of an Au-Dy-Si liquid alloy ion source for focussed ion beam implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 195, Issue 3-4, 2002, Pages 422-425

  Melnikov, A ^a   Gerya, T ^a   Hillmann, M ^a   Kamphausen, I ^a   Oswald, W ^a   Stauche, P ^a   Wernhardt, R ^a   Wieck, A D ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Alloy liquid metal ion source; Dysprosium ions; Focussed ion beam; Ternary alloy

Indexed keywords

COMPOSITION; DYSPROSIUM; EUTECTICS; GOLD ALLOYS; ION BEAMS; ION IMPLANTATION; PHASE DIAGRAMS; SPECTRUM ANALYSIS; TERNARY SYSTEMS;

FOCUSSING ION BEAM (FIB) SYSTEMS; LIQUID METAL ION SOURCES (LMIS);

ION SOURCES;

EID: 0036796806     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01127-8     Document Type: Article

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