SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium-Proceedings

Volumn 621, Issue , 2000, Pages Q751-Q758

Defect population and electrical properties of Ar+-laser crystallized polycrystalline silicon thin films

(8) Christiansen, S a Nerding, M a Eder, C a Andrae, G b Falk, F b Bergmann, J b Ose, M b Strunk, H P a

a UNIVERSITY OF ERLANGEN NUREMBERG (Germany)

b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; ELECTRIC PROPERTIES; ELECTRON DIFFRACTION; GRAIN BOUNDARIES; POLYSILICON; TRANSMISSION ELECTRON MICROSCOPY;

POLYCRYSTALLINE SILICON THIN FILMS;

THIN FILMS;

EID: 0034428513 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-621-q7.5.1 Document Type: Article

Times cited : (9)

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