SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 570, Issue , 1999, Pages 91-96

Homoepitaxial growth of si at low temperature (325 °C)

(5) Platen, J a Selle, B a Sieber, I a Zeimer, U a Fuhs, W a

a HAHN MEITNER INSTITUT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL ORIENTATION; ELECTRON CYCLOTRON RESONANCE; EPITAXIAL GROWTH; INTERFACES (MATERIALS); LOW TEMPERATURE TESTING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING FILMS; SURFACE STRUCTURE; THICKNESS MEASUREMENT;

EPITAXIAL THICKNESSES; HOMOEPITAXIAL GROWTH; LATTICE STRUCTURE;

SEMICONDUCTING SILICON;

EID: 0033331183 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-570-91 Document Type: Article

Times cited : (7)

References (18)

1
- 33750845606
- R. D. Bergmann, R. M. Hausner, N. Jensen, M. Grauvogl, L. Overbeck, T. Rinke, M. B. ' Schubert, C. Zaczek, R. Dassow, J. R. Köhler, U. Rau, S. Oelting, J. Krinke, H. P. Strunk, J. H. Werner, Proceed. 2nd World Conf. on Photovolt. Energy Conv. 1998, Wien, p. 1260
- Proceed. 2nd World Conf. on Photovolt. Energy Conv. 1998, Wien , pp. 1260
- Bergmann, R.D.¹ Hausner, R.M.² Jensen, N.³ Grauvogl, M.⁴ Overbeck, L.⁵ Rinke, T.⁶ 'Schubert, M.B.⁷ Zaczek, C.⁸ Dassow, R.⁹ Köhler, J.R.¹⁰ Rau, U.¹¹ Oelting, S.¹² Krinke, J.¹³ Strunk, H.P.¹⁴ Werner, J.H.¹⁵

2
- 0024714496
- J. H. Comfort, R. Reif, J. Electrochem. Soc. 136, 2398 (1989)
- (1989) J. Electrochem. Soc. , vol.136 , pp. 2398
- Comfort, J.H.¹ Reif, R.²

3
- 0000120146
- R. B. Bergmann, C. Zacsek, N. Jensen, S. Oelting, J. H. Werner, Appl. Phys. Lett. 72, 2996 (1998)
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2996
- Bergmann, R.B.¹ Zacsek, C.² Jensen, N.³ Oelting, S.⁴ Werner, J.H.⁵

4
- 0002034712
- Barcelona
- E. Conrad, L. Elstner, W. Fuhs, W. Henrion, P. Müller, J. Poortmans, B. Seile, U. Zeimer, Proceed. 14th European Photovoltaic Solar Energy Conference 1997, Barcelona, p. 1411
- (1997) Proceed. 14th European Photovoltaic Solar Energy Conference , pp. 1411
- Conrad, E.¹ Elstner, L.² Fuhs, W.³ Henrion, W.⁴ Müller, P.⁵ Poortmans, J.⁶ Seile, B.⁷ Zeimer, U.⁸

5
- 0000470360
- D. J. Eaglesham, H. -J. Gossmann, M. Cerullo, Phys. Rev. Lett. 65, 1227 (1990)
- (1990) Phys. Rev. Lett. , vol.65 , pp. 1227
- Eaglesham, D.J.¹ Gossmann, H.J.² Cerullo, M.³

6
- 35949010589
- H. Jorke, H. -J. Herzog, H. Kibbel, Phys. Rev. B 40, 2005 (1989)
- (1989) Phys. Rev. B , vol.40 , pp. 2005
- Jorke, H.¹ Herzog, H.J.² Kibbel, H.³

7
- 0000756467
- S. Tagaki, J. Phys. Soc. Japan 26, 1239 (1969)
- (1969) J. Phys. Soc. Japan , vol.26 , pp. 1239
- Tagaki, S.¹

8
- 0001457411
- D. Taupin, Bull. Soc. Fr. Mineral. Crystallogr. 87, 469 (1964)
- (1964) Bull. Soc. Fr. Mineral. Crystallogr. , vol.87 , pp. 469
- Taupin, D.¹

9
- 21544482195
- D. P. Adams, S. M. Yalisove, D. J. Eaglesham, App. Phys. Lett. 63, 3571 (1993)
- (1993) App. Phys. Lett. , vol.63 , pp. 3571
- Adams, D.P.¹ Yalisove, S.M.² Eaglesham, D.J.³

10
- 21544445658
- M. V. Ramana Murty, H. A. Atwater, A. J. Kellock, J. E. E. Baglin, Appl. Phys. Lett. 62, 2566(1993)
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2566
- Ramana Murty, M.V.¹ Atwater, H.A.² Kellock, A.J.³ Baglin, J.E.E.⁴

11
- 0000068409
- W. J. Varhue, J. L. Rogers, P. S. Andry, E. Adams, Appl. Phys. Lett. 68, 349 (1996)
- (1996) Appl. Phys. Lett. , vol.68 , pp. 349
- Varhue, W.J.¹ Rogers, J.L.² Andry, P.S.³ Adams, E.⁴

12
- 0001635338
- N. E. Lee, G. A. Tomasch, J. E. Greene, Appl. Phys. Lett. 65, 3236 (1994)
- (1994) Appl. Phys. Lett. , vol.65 , pp. 3236
- Lee, N.E.¹ Tomasch, G.A.² Greene, J.E.³

13
- 0001568721
- D. P. Adams, S. M. Yalisove, J. Appl. Phys. 76, 5185 (1994)
- (1994) J. Appl. Phys. , vol.76 , pp. 5185
- Adams, D.P.¹ Yalisove, S.M.²

14
- 6244251920
- D. J. Eaglesham, J. Appl. Phys. 77, 3597 (1995)
- (1995) J. Appl. Phys. , vol.77 , pp. 3597
- Eaglesham, D.J.¹

15
- 0342416266
- H. Yamada, Y. Torii, J. Appl. Phys. 64, 702 (1988)
- (1988) J. Appl. Phys. , vol.64 , pp. 702
- Yamada, H.¹ Torii, Y.²

16
- 0001680952
- B. E. Weir, B. S. Freer, R. L. Headrick, D. J. Eaglesham, G. H. Gilmer, J. Bevk, L. C. Feldman, Appl. Phys. Lett. 59, 204 (1991)
- (1991) Appl. Phys. Lett. , vol.59 , pp. 204
- Weir, B.E.¹ Freer, B.S.² Headrick, R.L.³ Eaglesham, D.J.⁴ Gilmer, G.H.⁵ Bevk, J.⁶ Feldman, L.C.⁷

17
- 0012702876
- R. Venkatasubramanian, S. Gorantla, S. Muthuvenkatraman, D. L. Dorsey, J. Appl. Phys. 80, 6219(1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 6219
- Venkatasubramanian, R.¹ Gorantla, S.² Muthuvenkatraman, S.³ Dorsey, D.L.⁴

18
- 0006276022
- Y. Yamamoto, Phys. Rev. B 50, 8534 (1994)
- (1994) Phys. Rev. B , vol.50 , pp. 8534
- Yamamoto, Y.¹

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