SCOPUS 정보 검색 플랫폼

Volumn 17, Issue 9, 2002, Pages 983-992

Characterization of sub-micrometre silicon films (Si-LPCVD) heavily in situ boron-doped and submitted to treatments of dry oxidation

(7) Ait Kaki A a Boulakroune, M a Boukezzata, M a Berrabah, M a Djahli, F b Bellatreche, M S a Bielle Daspet, D c

a Universite Mentouri Constantine (Algeria)

b FERHAT ABBAS UNIVERSITY (Algeria)

c LAAS CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; GRAIN GROWTH; OXIDATION; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR DOPING; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

DRY OXIDATION;

THIN FILMS;

EID: 0036713878 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/17/9/315 Document Type: Article

Times cited : (2)

References (37)

1
- 0016520176
- (1975) Solid-State Electron. , vol.18 , pp. 529
- Horiuchi, S.¹ Blanchard, R.²

2
- 0017677018
- (1977) Solid-State Electron. , vol.20 , pp. 985
- Coe, D.J.¹

3
- 0000267014
- (1990) J. Appl. Phys. , vol.67 , pp. 515
- Giroult, G.¹ Nouaihat, A.² Gauneau, M.³

4
- 0016962523
- (1976) J. Electrochem. Soc. , vol.123 , pp. 913
- Chappelow, R.E.¹ Lin, P.T.²

5
- 0026253939
- (1991) IEEE Trans. Electron Devices , vol.38 , pp. 2442
- Post, I.R.C.¹ Ashburn, P.²

6
- 0023400501
- (1987) IEEE Trans. Electron Devices , vol.34 , pp. 1774
- Kim, D.M.¹ Qian, F.²

7
- 0020750556
- (1983) J. Electrochem. Soc. , vol.130 , pp. 1168
- Chang, C.C.¹ Sheng, T.T.² Shankoff, T.A.³

8
- 0030171393
- (1996) Thin Solid Films , vol.279 , pp. 145
- Boukezzata, M.¹ Bielle-Daspet, D.² Sarrabayrouse, G.³ Mansour, F.⁴

9
- 0016597193
- (1975) J. Appl. Phys. , vol.46 , pp. 5247
- Seto, J.Y.¹

10
- 85176536084
- (1987) J. Appl. Phys. , vol.62 , pp. 1869
- Ada-Hanfi, M.¹ Secart, J.² Dusseau, J.M.³ Robert, J.L.⁴

11
- 0015145298
- (1971) J. Appl. Phys. , vol.42 , pp. 4357
- Kamins, T.I.¹

12
- 0019081768
- (1980) J. Appl. Phys. , vol.51 , pp. 5755
- Mandurah, M.M.¹ Sarawat, K.C.² Helms, C.R.³

13
- 0026118086
- (1991) J. Electrochem. Soc. , vol.138 , pp. 860
- Pennell, R.¹ Forestener, J.²

14
- 0019354162
- (1981) Solid-State Electron. , vol.24 , pp. 49
- Makinno, T.¹ Nakamura, H.²

15
- 0018469629
- (1979) Thin Solid Films , vol.59 , pp. 231
- Hitchman, M.L.¹ Kane, J.² Widner, A.E.³

16
- 0019081768
- (1980) J. Appl. Phys. , vol.51 , pp. 5755
- Kamins, T.I.¹ Manoliu, J.² Tuker, R.N.³

17
- 0023983028
- (1988) J. Electrochem. Soc. , vol.135 , pp. 671
- Prost, V.¹ Bohm, H.J.² Schaber, H.³ Oppolzer, H.⁴ Weitzel, I.⁵

18
- 0020799409
- (1983) J. Appl. Phys. , vol.54 , pp. 4405
- Rausch, W.A.¹ Lever, R.F.² Kastl, R.H.³

19
- 0000944919
- (1974) J. Appl. Phys. , vol.45 , pp. 1918
- Schwettmann, F.N.¹

20
- 0026220514
- (1991) Thin Solid Films , vol.204 , pp. 33
- Bielle-Daspet, D.¹ Schied, E.² Azzaro, C.³ De Mauduit, B.⁴ Pieraggi, B.⁵

21
- 0029326215
- (1995) Thin Solid Films , vol.261 , pp. 12
- Mansour, F.¹ Bouchemat, M.² Boukezzata, M.³ Toudjen, N.H.⁴ Bielle-Daspet, D.⁵ Mirouh, K.⁶

22
- 0001040041
- (1983) J. Appl. Phys. Lett. , vol.42 , pp. 249
- Harbek, G.¹ Krausbauer, L.² Steigmeir, E.F.³ Widmer, A.E.⁴

23
- 0029735449
- (1996) Thin Solid Films , vol.72 , pp. 289
- Husinky, W.¹ Betz, G.²

24
- 0003843864
- ed J. V. L. Fiermans and W. Dekeyser (New York: Plenum)
- (1978) Electron and Ion Spectroscopy in Solids
- Wemer, H.W.¹

25
- 0024717005
- (1989) Thin Solid Films , vol.175 , pp. 43
- Bielle-Daspet, D.¹ Mercadere, L.² Boukezzata, M.³ Pieraggi, B.⁴ De Mauduit, B.⁵

26
- 0023363195
- (1987) Thin Solid Films , vol.150 , pp. 69
- Bielle-Daspet, D.¹ Martinez, A.² Mansour, F.³ Pieraggi, B.⁴ David, M.J.⁵ De Mauduit, B.⁶ Oustry, A.⁷ Carles, R.⁸ Landa, J.⁹ Ajustron, F.¹⁰ Marzel, A.¹¹ Riboulet, P.¹²

27
- 0029779514
- (1996) Thin Solid Films , vol.272 , pp. 93
- Tompkins, H.G.¹ Seddoum, K.² Garling, L.K.³ Fejes, P.⁴

28
- 0019016874
- (1980) J. Appl. Phys. , vol.22 , pp. 35
- Ryssel, H.¹ Muller, K.² Haberger, K.³ Henkelmann, R.⁴ Jahel, F.⁵

29
- 0003679027
- (New York: McGraw-Hill) ch 7
- (1988) VLSI Technology 2nd edn
- Sze, S.M.¹

30
- 0003699181
- Sunset Beach, CA: Lattice Press
- (1986) Silicon Processing for the VLSI Era , vol.1
- Wolf, S.¹ Tauber, R.N.²

31
- 0019047016
- (1980) IEEE Trans. Electron Devices , vol.27 , pp. 1484
- Ryssel, H.¹ Haberger, K.² Hoffmann, K.³ Prinke, G.⁴ Dumcke, R.⁵ Sachs, A.⁶

32
- 0346658116
- (1954) Phys. Rev. , vol.96 , pp. 28
- Morin, F.J.¹ Maita, J.P.²

33
- 0017482694
- (1979) Solid-State Electron. , vol.20 , pp. 279
- Slotboom, J.W.¹

34
- 0020845356
- (1983) IEEE Trans. Electron Devices , vol.30 , pp. 1438
- Ho, C.P.¹ Plummer, J.D.² Hansen, S.E.³ Dutton, R.W.⁴

35
- 0021373309
- (1984) J. Appl. Phys. , vol.55 , pp. 1218
- Losee, D.L.¹ Lavine, J.P.² Trabka, E.A.³ Lee, S.T.⁴ Jarman, C.M.⁵

36
- 0029325763
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2000
- Chen, T.P.¹ Lee, T.F.² Chang, C.Y.³ Hsieh, W.Y.⁴ Chen, L.J.⁵

37
- 0022768293
- (1986) J Electrochem. Soc. , vol.133 , pp. 1721
- Nakayama, S.¹ Kawashima, I.² Murota, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.