Oxidation of molybdenum surfaces by reactive oxygen plasma and O2+ bombardment: An auger and XPS study

Surface and Interface Analysis

Volumn 26, Issue 4, 1998, Pages 235-241

  Lopez Carreno L D ^a   Benitez G ^a   Viscido, L ^a   Heras, J M ^a   Yubero, F ^b   Espinos J P ^b   Gonzalez Elipe A R ^b  

^a UNIVERSIDAD NACIONAL DE LA PLATA   (Argentina)

^b INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

Author keywords

Ballistic effects; Molybdenum oxides; Oxygen plasma; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; ELECTRON ENERGY LEVELS; ION BOMBARDMENT; IONIZATION OF SOLIDS; MOLYBDENUM COMPOUNDS; OXIDATION; PLASMA APPLICATIONS; SPECTRUM ANALYSIS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLYBDENUM OXIDES; REACTIVE PLASMAS;

MOLYBDENUM;

EID: 0032047956     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199804)26:4<235::aid-sia360>3.0.co;2-a     Document Type: Article

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