Nanocrystalline V2O5-TiO2 thin-films for oxygen sensing prepared by sol-gel process

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 484-490

  Zhuiykov, Serge ^a   Wlodarski, Wojtek ^b   Li, Yongxiang ^a  

^a RMIT UNIVERSITY   (Australia)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Oxygen measurement; Semiconductor sensor; Sol gel method

Indexed keywords

FILM PREPARATION; NANOSTRUCTURED MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE; SOL-GELS; THIN FILM DEVICES; TITANIUM OXIDES; VANADIUM COMPOUNDS;

SEMICONDUCTOR SENSOR;

OXYGEN SENSORS;

EID: 0035875746     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00739-0     Document Type: Article

References (6)

1. 3 thin-films activated by noble metals (Pd, Pt, Au) layers
2. 3 thin film prepared by sol-gel method
3. Environmental gas sensing
4. 3 thin films by the sol-gel method
5. 3 thin film gas sensor prepared by sol-gel and vacuum thermal evaporation