SCOPUS 정보 검색 플랫폼

Volumn 243, Issue 2, 2002, Pages 243-260

Simulation of large-scale silicon melt flow in magnetic Czochralski growth

(6) Savolainen, V a Heikonen, J a Ruokolainen, J a Anttila, O b Laakso, M b Paloheimo, J b

a CSC Scientific Computing Ltd (Finland)

Author keywords

A1. Finite element method; A1. Fluid flows; A1. Magnetic fields; A1. Residual free bubbles; A2. Czochralski method; A2. Magnetic field assisted Czochralski method; B2. Semiconducting silicon

Indexed keywords

FINITE ELEMENT METHOD; FLOW OF FLUIDS; MAGNETIC FIELD EFFECTS; MAGNETOHYDRODYNAMICS; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; SEMICONDUCTING SILICON;

RESIDUAL FREE BUBBLES;

CRYSTAL GROWTH FROM MELT;

EID: 0036680164 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(02)01441-0 Document Type: Article

Times cited : (65)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.