CoSi 2 formation in the presence of carbon

Journal of Applied Physics

Volumn 92, Issue 3, 2002, Pages 1207-1211

  Detavernier, C ^a   Van Meirhaeghe, R L ^a   Bender, H ^b   Richard, O ^b   Brijs, B ^b   Maex, K ^b  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; CAPPING LAYER; GRAIN-BOUNDARY DIFFUSION; HETEROGENEOUS NUCLEATION; HIGHER TEMPERATURES; LAYER THICKNESS; MODEL-BASED OPC; OUT-DIFFUSION; PHASE FORMATIONS; PREFERENTIAL ORIENTATION; SILICIDE FORMATION; THIN INTERLAYERS;

CERIUM ALLOYS; COMPOSITE FILMS; EPITAXIAL GROWTH; NUCLEATION; SILICIDES;

AMORPHOUS CARBON;

EID: 0036679083     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1488243     Document Type: Article

References (13)

1. H. S. Rhee, T. W. Jang, and B. T. Ahn, Appl. Phys. Lett. 74, 1003 (1999). apl APPLAB 0003-6951
2. H. S. Rhee, B. T. Ahn, and D. K. Sohn, J. Appl. Phys. 86, 3452 (1999). jap JAPIAU 0021-8979
3. H. S. Rhee and B. T. Ahn, Appl. Phys. Lett. 74, 3176 (1999). apl APPLAB 0003-6951
4. A. Vantomme, S. Degroote, J. Dekoster, G. Langouche, and R. Pretorius, Appl. Phys. Lett. 74, 3137 (1999). apl APPLAB 0003-6951
5. C. Detavernier, R. L. Van Meirhaeghe, F. Cardon, and K. Maex, Phys. Rev. B 62, 12045 (2000). prb PRBMDO 0163-1829
6. C. Detavernier, R. L. Van Meirhaeghe, K. Maex, W. Vandervorst, B. Brijs, and F. Cardon, Appl. Phys. Lett. 77, 3170 (2000). apl APPLAB 0003-6951
7. C. Detavernier, R. L. Van Meirhaeghe, F. Cardon, K. Maex, H. Bender, B. Brijs, and W. Vandervorst, J. Appl. Phys. 89, 2146 (2001). jap JAPIAU 0021-8979
8. A. Appelbaum, R. V. Knoell, and S. P. Murarka, J. Appl. Phys. 57, 1880 (1985). jap JAPIAU 0021-8979
9. F. M. d'Heurle, J. Mater. Res. 3, 167 (1988). jmr JMREEE 0884-2914
10. C. W. T. Bulle-Lieuwma, A. H. van Ommen, J. Hornstra, and C. N. A. M. Aussems, J. Appl. Phys. 71, 2211 (1992). jap JAPIAU 0021-8979
11. T. Hong, J. R. Smith, and D. J. Srolovitz, Phys. Rev. B 47, 13615 (1993). prb PRBMDO 0163-1829
12. R. Wu, A. J. Freeman, and G. B. Olson, Phys. Rev. B 53, 7504 (1996). prb PRBMDO 0163-1829
13. S. Teichert, M. Falke, H. Giesler, G. Beddies, H. J. Hinneberg, G. Lippert, J. Griesche, and H. J. Osten, Solid-State Electron. 43, 1051 (1999). sel SSELA5 0038-1101