SCOPUS 정보 검색 플랫폼

Advanced Engineering Materials

Volumn 4, Issue 8, 2002, Pages 607-609

Influence of annealing on the residual stress in sputter-deposited platinum films

(3) Harting M a Ntsoane, T P a Bucher, R a

a UNIVERSITY OF CAPE TOWN (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; PLATINUM; RESIDUAL STRESSES; SPUTTER DEPOSITION; THERMAL EFFECTS; X RAY ANALYSIS;

THIN FILM THERMOMETERS;

THIN FILMS;

EID: 0036672091 PISSN: 14381656 EISSN: None Source Type: Journal
DOI: 10.1002/1527-2648(20020806)4:8<607::AID-ADEM607>3.0.CO;2-E Document Type: Conference Paper

Times cited : (4)

References (10)

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2
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3
- 0033690660
- (2000) Thin Solid Films , vol.370 , pp. 232
- Knuyt, G.¹ Lauwerens, W.² Stals, L.M.³

4
- 84953681979
- (1991) J. Vac. Sci. Technol. , vol.A9 , pp. 2431
- Windischmann, H.¹

5
- 0031199186
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- Tsui, Y.C.¹ Clyne, T.W.²

6
- 0003691078
- D. Glocker, S. I. Shah (Eds.), IOP Press, London, Section A3.2.
- (1995) Handbook of Thin Film Process Technology
- Penfold, A.S.¹

7
- 0344641959
- D.T. nyBritton M. Härting (Ed.), Elsevier, New York
- (1999) Slow-Positron Beam Techniques for Solid and Surfaces , pp. 198
- Osipowicz, A.¹ Härting, M.² Hempel, M.³ Britton, D.T.⁴ Bauer-Kugelmann, W.⁵ Triftshäuser, W.⁶

8
- 0017719586
- (1977) Ann. Rev. Mater. Sci. , vol.7 , pp. 239
- Thornton, J.A.¹

9
- 0005238574
- submitted
- Biomaterials
- Härting, M.¹ Hempel, M.² Bucher, R.³ Heimann, R.B.⁴

10
- 0004133128
- Springer, New York
- (1987) Residual Stress Measurement by Diffraction and Interpretation
- Noyan, I.C.¹ Cohen, J.B.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.