Magnetic tunnel junctions with low resistance, high current density and good uniformity

Materials Research Society Symposium - Proceedings

Volumn 517, Issue , 1998, Pages 87-95

  Tsuge, H ^a   Mitsuzuka, T ^a   Kamijo, A ^a   Matsuda, K ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC RESISTANCE; FABRICATION; MAGNETORESISTANCE; METALLIC FILMS; OXIDATION; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE STRUCTURES;

ION MILLING; MAGNETIC TUNNEL JUNCTION; THERMAL OXIDATION; TRILAYER; UNIFORMITY;

TUNNEL JUNCTIONS;

EID: 0032294961     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)