Synthesis of diamond films at low temperature via glow plasma assisted hot filament chemical vapor deposition

Guangxue Xuebao/Acta Optica Sinica

Volumn 22, Issue 7, 2002, Pages 798-802

  Zhao, Qingxun ^a   Dong, Lifang ^a   Fu, Guangsheng ^a   Shang, Yong ^a   Yang, Jingfa ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

Diamond films; Glow plasma; Optical emission spectroscopy

Indexed keywords

DIAMONDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; TEST FACILITIES;

DIAMOND FILMS; GLOW PLASMA; OPTICAL EMISSION SPECTROSCOPY;

THIN FILMS;

EID: 0036659497     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (22)

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