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Diamond and Related Materials

Volumn 7, Issue 9, 1998, Pages 1364-1374

Atomic carbon insertion as a low-substrate-temperature growth mechanism in diamond CVD

(3) Joe, R a Badgwell, T A a Hauge, R H b

a Rice University (United States)

b RICE UNIVERSITY (United States)

Author keywords

Atomic carbon insertion; Diamond CVD; Substrate temperature

Indexed keywords

CARBON; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FILM GROWTH; FREE RADICALS;

ATOMIC CARBON INSERTION;

DIAMOND FILMS;

EID: 0032163582 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(98)00208-8 Document Type: Article

Times cited : (11)

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