Modulated CNx films prepared by IBAD

Diamond and Related Materials

Volumn 11, Issue 8, 2002, Pages 1552-1559

  Safran G ^a   Kolitsch, A ^b   Malhuitre, S ^b   Trasobares, S ^c   Kovacs I ^a   Geszti, O ^a   Menyhard M ^a   Colliex, C ^c   Radnoczi G ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c Laboratoire de Physique des Solides   (France)

Author keywords

Carbon nitride; Ion assisted deposition; Modulated structure; Sputter erosion rate

Indexed keywords

CARBON NITRIDE; ELECTRON ENERGY LOSS SPECTROSCOPY; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

RELATIVE EROSION RATES;

THIN FILMS;

FILM;

EID: 0036646877     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00099-7     Document Type: Article

References (20)

1. Sample preparation techniques for TEM
2. NEXAFS spectroscopy
3. Electron energy loss spectroscopy in the electron microscope