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Volumn 13, Issue 7, 2002, Pages 1138-1145

High-accuracy gas flow dilutor using mass flow controllers with binary weighted flows

Author keywords

Binary weighted flow; Gas flow dilutor; Gas metrology; Thermal mass flow controller

Indexed keywords

CALIBRATION; GAS FUEL ANALYSIS;

EID: 0036646789     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/13/7/323     Document Type: Article
Times cited : (10)

References (11)
  • 1
    • 0028244003 scopus 로고
    • Laboratory evaluation of gas dilution systems for analyser calibration and calibration gas analysis
    • (1994) Air Waste , vol.44 , pp. 428-430
    • Wright, R.S.1    Murdoch, R.W.2
  • 9
    • 0032119864 scopus 로고    scopus 로고
    • Beyond conversion factors: A new approach to MFC calibration
    • (1998) Semicond. Int , vol.21 , pp. 243-250
    • Dille, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.