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Volumn 13, Issue 7, 2002, Pages 1138-1145
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High-accuracy gas flow dilutor using mass flow controllers with binary weighted flows
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Author keywords
Binary weighted flow; Gas flow dilutor; Gas metrology; Thermal mass flow controller
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Indexed keywords
CALIBRATION;
GAS FUEL ANALYSIS;
MASS FLOW CONTROLLERS;
FLOW CONTROL;
BINARY FLUID DIVIDER;
CALIBRATION;
DILUTION;
GAS FLOW;
MEASUREMENT METHOD;
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EID: 0036646789
PISSN: 09570233
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-0233/13/7/323 Document Type: Article |
Times cited : (10)
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References (11)
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