Accurate, reliable control of process gases by mass flow controllers

TMS Annual Meeting

Volumn , Issue , 1997, Pages 161-169

  McKnight, Tim ^a   Hardy, Jim ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTRONICS INDUSTRY; ENVIRONMENTAL IMPACT; FLOW CONTROL; GASES; MATERIALS HANDLING; MATERIALS SCIENCE; PROCESS CONTROL; PROCESSING; RELIABILITY;

ACCURACY; REPRODUCIBILITY; THERMAL MASS FLOW CONTROLLERS;

CHEMICAL SENSORS;

EID: 0031332721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)