An energy analyzer for high-speed secondary electrons accelerated in inspection SEM imaging

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 1083-1088

  Takafuji, A ^a   Murakoshi, H ^a   Shinada, H ^a   Matsui, M ^a   Nishiyama, H ^a   Nozoe, M ^a  

^a HITACHI LTD   (Japan)

Author keywords

Energy analyzer; Scanning electron microscope (SEM); Secondary electron; Voltage contrast; Wafer inspection

Indexed keywords

ELECTRIC FIELDS; ELECTRODES; ELECTRON BEAMS; ELECTROSTATICS; PARTICLE ACCELERATORS; SCANNING ELECTRON MICROSCOPY;

HIGH-SPEED SECONDARY ELECTRONS;

MICROELECTRONICS;

EID: 0036643615     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00542-7     Document Type: Conference Paper

References (4)